[n] A. Endo, K. Sakaue, M. Washio, and H. Mizoguchi, “Optimization of High Average Power FEL Beam for EUV Lithography Application”, in Proc. FEL'14, Basel, Switzerland, Aug. 2014, paper FRA04, pp. 990-992.
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Paper Title: Optimization of High Average Power FEL Beam for EUV Lithography Application
Paper URL: https://jacow.org/FEL2014/papers/FRA04.pdf
Conference: 36th Int. Free Electron Laser Conf. (FEL'14)
Paper ID: FRA04
Location in proceedings: 990-992
Original Author String: A. Endo, K. Sakaue, M. Washio [Waseda University, Tokyo, Japan] H. Mizoguchi [Gigaphoton Inc, Hiratsuka, Kanagawa, Japan]