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[n]	P. Pizzol, P. Chalker, J. W. Roberts, J. Wrench, O. B. Malyshev, and R. Valizadeh, “Atomic Layer Deposition of Niobium Nitride from Different Precursors”, in Proc. IPAC'17, Copenhagen, Denmark, May 2017, pp. 1094-1097. doi:10.18429/JACoW-IPAC2017-MOPVA100

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