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[n]	Z. Sun, M. Liepe, T. E. Oseroff, and X. Deng, “Characterization of Atomic-Layer-Deposited NbTiN and NbTiN/AlN Films for SIS Multilayer Structures”, in Proc. SRF'21, East Lansing, MI, USA, Jun.-Jul. 2021, pp. 662. doi:10.18429/JACoW-SRF2021-WEPTEV012

For LaTeX

%\cite{Sun:SRF21-WEPTEV012} \bibitem{Sun:SRF21-WEPTEV012} Z. Sun, M. Liepe, T. E. Oseroff, and X. Deng, \textquotedblleft{Characterization of Atomic-Layer-Deposited NbTiN and NbTiN/AlN Films for SIS Multilayer Structures}\textquotedblright, in \emph{Proc. SRF’21}, East Lansing, MI, USA, Jun.-Jul. 2021, pp. 662. \url{doi:10.18429/JACoW-SRF2021-WEPTEV012}

For BibTeX

@inproceedings{sun:srf21-weptev012, author = {Z. Sun and M. Liepe and T. E. Oseroff and X. Deng}, title = {{Characterization of Atomic-Layer-Deposited NbTiN and NbTiN/AlN Films for SIS Multilayer Structures}}, booktitle = {Proc. SRF'21}, pages = {662}, paper = {WEPTEV012}, venue = {East Lansing, MI, USA}, series = {International Conference on RF Superconductivity}, number = {20}, publisher = {JACoW Publishing, Geneva, Switzerland}, month = {10}, year = {2022}, issn = {2673-5504}, isbn = {978-3-95-450233-2}, doi = {10.18429/JACoW-SRF2021-WEPTEV012}, url = {https://jacow.org/srf2021/papers/WEPTEV012.pdf}, language = {english} }

References

• Z. Sun, M. Liepe, T. E. Oseroff, and X. Deng, “Characterization of Atomic-Layer-Deposited NbTiN and NbTiN/AlN Films for SIS Multilayer Structures”, in Proc. 20th International Conference on RF Superconductivity (SRF'21), East Lansing, MI, USA, Jun.-Jul. 2021, pp. 662.