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[n]	P. Thieberger et al., “The Electron Backscattering Detector (eBSD), a New Tool for the Precise Mutual Alignment of the Electron and Ion Beams in Electron Lenses”, in Proc. IBIC'14, Monterey, CA, USA, Sep. 2014, paper MOPD02, pp. 129-133. 

For LaTeX

%\cite{Thieberger:IBIC14-MOPD02} \bibitem{Thieberger:IBIC14-MOPD02} P. Thieberger \emph{et al.}, \textquotedblleft{The Electron Backscattering Detector (eBSD), a New Tool for the Precise Mutual Alignment of the Electron and Ion Beams in Electron Lenses}\textquotedblright, in \emph{Proc. IBIC’14}, Monterey, CA, USA, Sep. 2014, paper MOPD02, pp. 129--133.

For BibTeX

@inproceedings{thieberger:ibic14-mopd02, author = {P. Thieberger and others}, title = {{The Electron Backscattering Detector (eBSD), a New Tool for the Precise Mutual Alignment of the Electron and Ion Beams in Electron Lenses}}, booktitle = {Proc. IBIC'14}, pages = {129--133}, paper = {MOPD02}, venue = {Monterey, CA, USA, Sep. 2014}, publisher = {JACoW Publishing, Geneva, Switzerland}, url = {https://jacow.org/IBIC2014/papers/MOPD02.pdf}, language = {english} }

References

• P. Thieberger et al., “The Electron Backscattering Detector (eBSD), a New Tool for the Precise Mutual Alignment of the Electron and Ion Beams in Electron Lenses”, in Proc. 3rd Int. Beam Instrumentation Conf. (IBIC'14), Monterey, CA, USA, Sep. 2014, paper MOPD02, pp. 129-133.