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[n]	T. J. Campese et al., “Multi-Diagnostic Transverse Profile Monitor Chamber for Extreme Ultraviolet Lithography”, in Proc. IBIC'15, Melbourne, Australia, Sep. 2015, pp. 554-556. doi:10.18429/JACoW-IBIC2015-TUPB085

For LaTeX

%\cite{Campese:IBIC15-TUPB085} \bibitem{Campese:IBIC15-TUPB085} T. J. Campese \emph{et al.}, \textquotedblleft{Multi-Diagnostic Transverse Profile Monitor Chamber for Extreme Ultraviolet Lithography}\textquotedblright, in \emph{Proc. IBIC’15}, Melbourne, Australia, Sep. 2015, pp. 554--556. \url{doi:10.18429/JACoW-IBIC2015-TUPB085}

For BibTeX

@inproceedings{campese:ibic15-tupb085, author = {T. J. Campese and others}, title = {{Multi-Diagnostic Transverse Profile Monitor Chamber for Extreme Ultraviolet Lithography}}, booktitle = {Proc. IBIC'15}, pages = {554--556}, paper = {TUPB085}, venue = {Melbourne, Australia, Sep. 2015}, publisher = {JACoW Publishing, Geneva, Switzerland}, doi = {10.18429/JACoW-IBIC2015-TUPB085}, url = {https://jacow.org/IBIC2015/papers/TUPB085.pdf}, language = {english} }

References

• T. J. Campese et al., “Multi-Diagnostic Transverse Profile Monitor Chamber for Extreme Ultraviolet Lithography”, in Proc. 4th Int. Beam Instrumentation Conf. (IBIC'15), Melbourne, Australia, Sep. 2015, pp. 554-556.