JaCoW Logo

Reference Search

Favourites


For Word

[n]	S. Simon, C. Benjamin, J. Bradley, and R. Valizadeh, “Impact of ion and neutral angular distribution on thin film deposition in HiPIMS and bipolar HiPIMS”, presented at the IPAC'25, Taipei, Taiwan, Jun. 2025, paper WEPB073, this conference. 

For LaTeX

Use Complete Form

For BibTeX

References

Back to search