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[n]	P. Y. Nabhiraj, R. K. Bhandari, G. G, C. Mallik, R. Menon, and S. Mohan, “Design of High Current RF Ion Source for Micromachining Applications”, in Proc. APAC'07, Indore, India, Jan.-Feb. 2007, paper TUPMA113, pp. 262-264. 

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