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[n]	M. Toyoda, R. Sunayama, and M. Yanagihara, “Low-Order Aberrations Correction of Extreme Ultraviolet Imaging Objective with Deformable Multilayer Mirrors”, in Proc. MEDSI'16, Barcelona, Spain, Sep. 2016, pp. 213-215. doi:10.18429/JACoW-MEDSI2016-TUPE22

For LaTeX

%\cite{Toyoda:MEDSI16-TUPE22} \bibitem{Toyoda:MEDSI16-TUPE22} M. Toyoda, R. Sunayama, and M. Yanagihara, \textquotedblleft{Low-Order Aberrations Correction of Extreme Ultraviolet Imaging Objective with Deformable Multilayer Mirrors}\textquotedblright, in \emph{Proc. MEDSI’16}, Barcelona, Spain, Sep. 2016, pp. 213--215. \url{doi:10.18429/JACoW-MEDSI2016-TUPE22}

For BibTeX

@inproceedings{toyoda:medsi16-tupe22, author = {M. Toyoda and R. Sunayama and M. Yanagihara}, title = {{Low-Order Aberrations Correction of Extreme Ultraviolet Imaging Objective with Deformable Multilayer Mirrors}}, booktitle = {Proc. MEDSI'16}, pages = {213--215}, paper = {TUPE22}, venue = {Barcelona, Spain, Sep. 2016}, publisher = {JACoW Publishing, Geneva, Switzerland}, doi = {10.18429/JACoW-MEDSI2016-TUPE22}, url = {https://jacow.org/medsi2016/papers/TUPE22.pdf}, language = {english} }

References

• M. Toyoda, R. Sunayama, and M. Yanagihara, “Low-Order Aberrations Correction of Extreme Ultraviolet Imaging Objective with Deformable Multilayer Mirrors”, in Proc. 9th Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation Conf. (MEDSI'16), Barcelona, Spain, Sep. 2016, pp. 213-215.