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For Word

[n]	A. Heuberger, “Lithography Production Techniques for next Generations of Microelectronics”, in Proc. EPAC'92, Berlin, Germany, Mar. 1992, pp. 192-197. 

For LaTeX

%\cite{Heuberger:EPAC92} \bibitem{Heuberger:EPAC92} A. Heuberger, \textquotedblleft{Lithography Production Techniques for next Generations of Microelectronics}\textquotedblright, in \emph{Proc. EPAC’92}, Berlin, Germany, Mar. 1992, pp. 192--197.

For BibTeX

@inproceedings{heuberger:epac92, author = {A. Heuberger}, title = {{Lithography Production Techniques for next Generations of Microelectronics}}, booktitle = {Proc. EPAC'92}, pages = {192--197}, paper = {}, venue = {Berlin, Germany, Mar. 1992}, series = {European Particle Accelerator Conference}, number = {3}, publisher = {JACoW Publishing, Geneva, Switzerland}, language = {english} }

References

• A. Heuberger, “Lithography Production Techniques for next Generations of Microelectronics”, in Proc. 3rd European Particle Accelerator Conf. (EPAC'92), Berlin, Germany, Mar. 1992, pp. 192-197.