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For Word

[n]	J. Melngailis, “Ion Sources for Nanofabrication and High Resolution Lithography”, in Proc. PAC'01, Chicago, IL, USA, Jun. 2001, paper MOPB007, pp. 76-80. 

For LaTeX

%\cite{Melngailis:PAC01-MOPB007} \bibitem{Melngailis:PAC01-MOPB007} J. Melngailis, \textquotedblleft{Ion Sources for Nanofabrication and High Resolution Lithography}\textquotedblright, in \emph{Proc. PAC’01}, Chicago, IL, USA, Jun. 2001, paper MOPB007, pp. 76--80.

For BibTeX

@inproceedings{melngailis:pac01-mopb007, author = {J. Melngailis}, title = {{Ion Sources for Nanofabrication and High Resolution Lithography}}, booktitle = {Proc. PAC'01}, pages = {76--80}, paper = {MOPB007}, venue = {Chicago, IL, USA, Jun. 2001}, publisher = {JACoW Publishing, Geneva, Switzerland}, url = {https://jacow.org/p01/papers/MOPB007.pdf}, language = {english} }

References

• J. Melngailis, “Ion Sources for Nanofabrication and High Resolution Lithography”, in Proc. 19th Particle Accelerator Conf. (PAC'01), Chicago, IL, USA, Jun. 2001, paper MOPB007, pp. 76-80.