[n] X. Liu, M. R. Adams, Y. He, and Y. Li, “Vacuum Pumping Performance Comparison of Non-Evaporable Getter Thin Films Deposited Using Argon and Krypton as Sputtering Gases”, in Proc. PAC'05, Knoxville, TN, USA, May 2005, paper RPPE045, pp. 2860-2862.
Use Complete Form