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[n]	C.-S. Huang, B.-Y. Chen, C.-K. Kuan, W.-Y. Lai, T.-C. Tseng, and H.-S. Wang, “Anodic bonding of silicon and glass for bent monochromator”, in Proc. IPAC'23, Venice, Italy, May 2023, pp. 4953-4956. doi:10.18429/JACoW-IPAC2023-THPM028

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