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[n]	A-M. Valente-Feliciano, H. L. Phillips, S. Popovic, M. Ra?íkovic, J. Upadhyay, and L. Vu?íkovic, “Plasma Etching of a Single-Cell RF Cavity ÔÇô Asymmetric Electronegative Discharge”, in Proc. SRF'09, Berlin, Germany, Sep. 2009, paper TUPPO083, pp. 427-430. 

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