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For Word

[n]	J. Norem et al., “Atomic Layer Deposition for SRF Cavities”, in Proc. PAC'09, Vancouver, Canada, May 2009, paper TU5PFP002, pp. 803-805. 

For LaTeX

%\cite{Norem:PAC09-TU5PFP002} \bibitem{Norem:PAC09-TU5PFP002} J. Norem \emph{et al.}, \textquotedblleft{Atomic Layer Deposition for SRF Cavities}\textquotedblright, in \emph{Proc. PAC’09}, Vancouver, Canada, May 2009, paper TU5PFP002, pp. 803--805.

For BibTeX

@inproceedings{norem:pac09-tu5pfp002, author = {J. Norem and others}, title = {{Atomic Layer Deposition for SRF Cavities}}, booktitle = {Proc. PAC'09}, pages = {803--805}, paper = {TU5PFP002}, venue = {Vancouver, Canada, May 2009}, series = {Particle Accelerator Conference}, number = {23}, publisher = {JACoW Publishing, Geneva, Switzerland}, url = {https://jacow.org/PAC2009/papers/TU5PFP002.pdf}, language = {english} }

References

• J. Norem et al., “Atomic Layer Deposition for SRF Cavities”, in Proc. 23rd Particle Accelerator Conf. (PAC'09), Vancouver, Canada, May 2009, paper TU5PFP002, pp. 803-805.