[n] B. Rachmilowitz et al., “Large-area atomic layer deposition of titanium nitride for RF windows”, in Proc. IPAC'25, Taipei, Taiwan, Jun. 2025, pp. 2668-2669. doi:10.18429/JACoW-IPAC2025-THPB094
%\cite{Rachmilowitz:IPAC25-THPB094} \bibitem{Rachmilowitz:IPAC25-THPB094} B. Rachmilowitz \emph{et al.}, \textquotedblleft{Large-area atomic layer deposition of titanium nitride for RF windows}\textquotedblright, in \emph{Proc. IPAC’25}, Taipei, Taiwan, Jun. 2025, pp. 2668--2669. \doi{10.18429/JACoW-IPAC2025-THPB094}
@inproceedings{rachmilowitz:ipac25-thpb094, author = {B. Rachmilowitz and others}, title = {{Large-area atomic layer deposition of titanium nitride for RF windows}}, booktitle = {Proc. IPAC'25}, pages = {2668--2669}, paper = {THPB094}, venue = {Taipei, Taiwan}, series = {International Particle Accelerator Conference}, number = {16}, publisher = {JACoW Publishing, Geneva, Switzerland}, month = {11}, year = {2025}, issn = {2673-5490}, isbn = {978-3-95-450248-6}, doi = {10.18429/JACoW-IPAC2025-THPB094}, language = {english} }