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[n]	G. Gaitan et al., “Development of a Plasma-Enhanced Chemical Vapor Deposition System for High-Performance SRF Cavities”, in Proc. SRF'23, Grand Rapids, MI, USA, Jun. 2023, paper MOPMB015, pp. 100-103. 

For LaTeX

%\cite{Gaitan:SRF23-MOPMB015} \bibitem{Gaitan:SRF23-MOPMB015} G. Gaitan \emph{et al.}, \textquotedblleft{Development of a Plasma-Enhanced Chemical Vapor Deposition System for High-Performance SRF Cavities}\textquotedblright, in \emph{Proc. SRF’23}, Grand Rapids, MI, USA, Jun. 2023, paper MOPMB015, pp. 100--103.

For BibTeX

@inproceedings{gaitan:srf23-mopmb015, author = {G. Gaitan and others}, title = {{Development of a Plasma-Enhanced Chemical Vapor Deposition System for High-Performance SRF Cavities}}, booktitle = {Proc. SRF'23}, pages = {100--103}, paper = {MOPMB015}, venue = {Grand Rapids, MI, USA}, series = {International Conference on RF Superconductivity}, number = {21}, publisher = {JACoW Publishing, Geneva, Switzerland}, month = {8}, year = {2023}, issn = {2673-5504}, isbn = {978-3-95-450234-9}, language = {english} }

References

• G. Gaitan et al., “Development of a Plasma-Enhanced Chemical Vapor Deposition System for High-Performance SRF Cavities”, presented at the 21th Int. Conf. RF Superconductivity (SRF'23), Grand Rapids, MI, USA, Jun. 2023, paper MOPMB015, unpublished.