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[n]	I. Gonz?ílez D?¡az-Palacio, R. H. Blick, W. Hillert, M. Wenskat, and R. Zierold, “ALD-Based NbTiN Studies for SIS R&D”, in Proc. IPAC'21, Campinas, Brazil, May 2021, pp. 4420-4421. doi:10.18429/JACoW-IPAC2021-THPAB320

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